• 10:00-10:25
  • Zaal 20

Motion & Sensing: precise motion control for quality assurance and development

  • Dr. Ing. Danilo Schmidt
  • attocube systems AG

The Motion & Sensing components and systems of attocube systems combine our expertise in both piezoelectric motors and Fabry-Perot-Interferometry to provide precise motion control. Precision nanopositioners can be operated in a closed loop system with displacement measuring interferometers – a nano motion control system meeting the highest requirements on precision and accuracy. The focused applications reach from sample positioning in synchrotrons to support processes in quality assurance in semiconductor industries, e.g. wafer positioning and measuring wafer deformation. Our presentation includes newly implemented applications as well as new developments and features for our nanopositioners and interferometers.