• 13:30-13:55
  • Baroniezaal
  • Metrology

In-line Interferometer for Surface Topology Inspection of Flexible Electronics

  • Dr. Theresa Spaan-Burke
  • IBS Precision Engineering

In the production of flexible electronics, such as organic LEDs or photo-voltaic foils, grooves through one or more layers are made with laser ablation, to create functional isolators or junctions. To guarantee the quality of the electronics, the laser scribe width and depth needs to be precisely controlled and inspected. For in-line inspection of the laser scribes, the wavelength scanning interferometer based tool ARINNA (“Areal Interferometer for Nanoscale Structures”) offers a potentially revolutionary measurement technology.