• 10:30-10:55
  • Zaal 20

Metrology in motion control by MKS Instruments

  • Jorg Bos
  • Newport Spectra-Physics BV

Everybody assumes that a linear or rotary stage is preforming as it should but how can you be sure? This is where metrology kicks in! What is MIM and do we understand the difference between accuracy and repeatability? What influences good motion control and how to tackle these influences? This and more will be highlighted during this presentation.