• 11:50-12:15
  • Zaal 20
  • Engineering in Precision

Development of engineered-to-spec motion systems

  • Mathys te Wierik MSc
  • PM BV

PM developed a high-end motion system for next generation semiconductor metrology applications: an engineered to spec motion system which includes the lastest know-how in design, manufacturing, assembly and qualification. In this sesion PM will share its design philosophy and show the innovative concept which meets the unique technical application requirements.