• 11:50-12:15
  • Zaal 19

Machining and RGA Specifications of ASML

  • John Stegeman
  • ASML
  • Hans Cools
  • Innovar
  • Henry van Haeff
  • 2-S

This lecture will present an overview of surface-contamination, generated during the manufacturing processes at out supply chain, and its effect on contamination and yield losses at ASML customers. It is key that suppliers are aware of their contribution on the cleanliness level on the complete ASML product cycle is important.
For the ASML EUV program, outgassing specifications and its verification technique (RGA) will be presented in more detail.