Particle Contamination Control in high-tech equipment becomes more critical as technical applications become smaller and more sensitive. To prevent the deposition of particles on critical surfaces, the life of a particle is considered for developmental purposes: generation, transportation and deposition. We will present examples of research collaboration between the Eindhoven University of Technology and VDL ETG regarding the life of a particle. This knowledge is being applied in the design and production of state-of-the-art equipment for our global customers. Amongst others, air flow optimization by measurements and simulations, as a means to reduce the transport of particles to critical surfaces, will be shown.
- Zaal 20
- Conditioning; Cryogenics, Cleanliness and Vacuum