• 10:00-10:25
  • Zaal 20

Thermal control along the Product Life Cycle

  • Dr. Ir. Paul Blom
  • VDL ETG

To improve the accuracy and repeatability of high-tech equipment,  thermal control needs to be further investigated and improved. For this presentation we will focus on the analytics application, specifically the electron microscope.
We will describe all aspects of thermal control along the entire product life cycle of an electron microscope, going from the design phase, via the manufacturing to the service phase.