MFC’s, Mass Flow Controllers, are flow devices for gas flow measurement. These instruments are measuring gas mass flow. With an integral flow control valve, these instruments can regulate the flow, following a setpoint. This setpoint can be entered manually, or via analog or serial input signal coming from a computer, PLC or some other controller.
The presentation is covering the use of 3 flow measuring techniques in these MFC (or actually 2 with an interesting variation in the sensor), and explain the technological features and benefits of each of them, like f.i. applicability, accuracy, reliability and the Total Cost of Ownership.