• 11:50-12:15

Calibration results of a ultra-sensitive RGA test setup

  • Dr. Ir. John Timmermans
  • NTS-Group

To serve the increasing cleanliness demands of our customers, the Cleanliness Competence Team of NTS has developed an ultra-sensitive RGA test setup. This system has some unique features:
• Bake out up to 300°C for very low background enabled by using CF-flanges.
• Utilization of the total dynamic range of the mass spectrometer, by optimizing the vacuum level with an in-vacuum adjustable diaphragm to squeeze the pump speed.
• A calibrated leak to measure the pump speed of each diaphragm position.

The results of these calibrations demonstrate the sensitivity of the setup.