• 15:00-15:25

Vibration isolation for nanometer transfer measurements

  • Bas Lemmen
  • Demcon

Insight and design of a vibration isolation system to ensure nanometer stability of a metrology frame. For a client of Demcon a DUT transfer function measurement is used to determine quality and defects in the end product before installation. Measurement resolution and accuracy demands are high and require careful consideration of system components. During this lecture, we will provide details on design choices and impact to optimize the overall system dynamics.