As semiconductor wafers and microelectronic components become smaller and more complex, greater demands are placed on quality inspection systems.
Precitec’s new chromatic confocal line sensor CHRocodile CLS 2.0 scans at up to 18,300 lines/sec – ideal for time-critical inline inspection, e.g. measuring complex geometries like the tiny wire bonding connecting chips to packages – without shadowing effects.
Easily exchangeable optical probes meet all application requirements, e.g. line lengths of up to 12 mm for fast inspection of large parts or shorter lines (numerical aperture >0.77) for highly angled surfaces, e.g. measuring small wafer bumps or the steeply sloped edges of silicon wafers.